Progress on carbon nanotube BEOL interconnects.

Benjamin Uhlig, Jie Liang, Jaehyun Lee, Raphael Ramos, Abitha Dhavamani, Nicole Nagy, Jean Dijon, Hanako Okuno, Dipankar Kalita, Vihar P. Georgiev, Asen Asenov, Salvatore M. Amoroso, Liping Wang, Campbell Millar, F. Konemann, Bernd Gotsmann, Goncalo Goncalves, Bingan Chen, Reeturaj Pandey, R. Chen, Aida Todri-Sanial

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