Study of sub-5 nm RRAM, tunneling selector and selector less device.

Kai-Shin Li, Ming-Taou Lee, Min-Cheng Chen, Cho-Lun Hsu, J. M. Lu, C. H. Lin, C. C. Chen, B. W. Wu, Y. F. Hou, C. Yi. Lin, Y. J. Chen, T. Y. Lai, M. Y. Li, I. Yang, C. S. Wu, Fu-Liang Yang, W. K. Yeh

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