Integrated Re-Fragmentation and Curve Correction for Curvilinear Optical Proximity Correction.
Seohyun Kim, Shilong Zhang, Junha Jang, Youngsoo Shin
Browse the full ASPDAC paper archive.
Seohyun Kim, Shilong Zhang, Junha Jang, Youngsoo Shin
Browse the full ASPDAC paper archive.