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On-chip integration of ultra-thin glass cantilever for physical property measurement activated by femtosecond laser impulse.

Tao Tang, Yansheng Hao, Yigang Shen, Yo Tanaka, Ming Huang, Yoichiroh Hosokawa, Ming Li, Yaxiaer Yalikun

VenueAIROS
Year2020
ProceedingsIROS

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