Heterogeneous integration of nano enabling devices for 3D ICs.

Li Wang, Rui Ma, Chen Zhang, Zongyu Dong, Xin Wang, Zitao Shi, Jian Liu, Lin Lin, Hui Zhao, Fei Lu, Qiang Fang, Chen Yang, Jing Zhan, Tianling Ren, Xinxin Li, Ru Huang, Albert Wang

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