Electrical calibration of spring-mass MEMS capacitive accelerometers.

Lingfei Deng, Vinay Kundur, Naveen Sai Jangala Naga, Muhlis Kenan Ozel, Ender Yilmaz, Sule Ozev, Bertan Bakkaloglu, Sayfe Kiaei, Divya Pratab, Tehmoor Dar

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