TestDNA: Novel Wafer Defect Signature for Diagnosis and Yield Learning.
Andrew Yi-Ann Huang, Katherine Shu-Min Li, Cheng-Yen Tsai, Ken Chau-Cheung Cheng, Sying-Jyan Wang, Xu-Hao Jiang, Leon Chou, Chen-Shiun Lee
Browse the full ITC paper archive.
Andrew Yi-Ann Huang, Katherine Shu-Min Li, Cheng-Yen Tsai, Ken Chau-Cheung Cheng, Sying-Jyan Wang, Xu-Hao Jiang, Leon Chou, Chen-Shiun Lee
Browse the full ITC paper archive.